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This project proposes a novel route for highly doped p-type in GaN using the process of solid phase epitaxy (SPE) after implantation. This SPE process involves the conversion of a metastable amorphous region containing the targeted p-type dopant (e.g. Mg) into a crystalline region through modest temperature anneals. In prior work on other semiconductors, SPE has shown to result in increased active dopant concentration that is in great excess of the solid solubility limit, decreased damaged, reduced channeling and lower temperature operation. All these characteristics are highly desirable for GaN vertical devices and warrant investigation of SPE in GaN. The proposed research aims to solve the fundamental problem in GaN devices towards power and RF device.

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Two tasks will be explored in Misra?s group. 1) ALD Development of ultra-high aspect ratio and highly conducting Li-based compounds for energy storage application. 2) GaN Nanowire based sensor development for environmental monitoring. In the first task, we will evaluate the initial growth mechanisms of Li-compounds (Lithium-Aluminum Oxide, Lithium-Lanthanum Oxide, during the ALD growth and develop 3-D device structures and process modules. In the second task, we will develop the process module to fabricate GaN nanowire and AlGaN/GaN based sensor using conventional top-down approaches or synthesize GaN nanowires using catalytic thermal CVD methods.

Advanced Self-powered Systems of Integrated Sensor Technologies (ASSIST) vision is to be a dynamic leader in development of wearable, self-powered integrated sensor technologies for continuous health and environmental monitoring. These technologies will directly respond to NAE?s Grand Challenge to advance health informatics to improve acquisition, management and use of health information to enhance medical care, correlate disease and environment and revolutionize response to public health emergencies, disasters, pandemics and/or chem-bio attacks. ASSIST?s mission is to transform US and global health informatics, electronics and biomedical engineering industries through development and demonstration of fundamental and enabling nanotechnologies for energy harvesting, battery-free energy storage and ultra-low power computation and communication, integrated with physiological and environmental nanosensors and biocompatible materials, to empower personal environmental health monitoring and emergency response. Goals: 1. Advance discovery in energy harvesting and storage, multifunctional sensors and materials, and low-power systems design; 2. Develop enabling technologies for energy conversion, device reliability and ultra-low power computation and communications, with integration to achieve two 1st-generation test-beds: self-sustaining wireless nodes and conformal multifunctional applications; 3. Develop systems integration requirements and demonstrate ?Exposure Track? and ?Emergency Track? testbeds; 4. Develop efficient and secure methods to handle large quantities of data and retrieve patterns of environmental and health correlations; 5. Create a culture of team-based research, education and innovation, cultivating a diverse group of talented, well prepared graduates excited about research, design and production of health informatics and biomedical engineering solutions to improve global health and safety; 6. Form partnerships with precollege institutions to strengthen the STEM pipeline by helping middle and high school students and teachers develop technical literacy and motivation to contribute to solving NAE Grand Challenges; 7. Stimulate entrepreneurship and form sustainable partnerships with small and large firms, health practitioners and emergency responders to link ASSIST discoveries to innovation, accelerated commercialization and job creation. ASSIST integrated sensor technologies will result in a wearable health patch that incorporates energy harvesting and storage, computation and communication, along with low-power integrated sensors for health and environmental exposures. This will be the platform technology that will drive two systems applications related to global health. The first, the Exposure Track, will enable longitudinal, simultaneous monitoring of environmental factors and human health parameters to create an unprecedented set of data to lead to direct understanding of how environment impacts health. This information, of great interest to EPA and CDC, will revolutionize our understanding of environmental health and may impact future regulatory policies. The patch?s self-powered nature will enable critical longitudinal monitoring. This system will involve epidemiologists, social scientists, data mining, pattern recognition professionals and EPA scientists to further understanding of environmental health. The patch will also drive a second system, the Wellness Track, which will aim to empower patients to take charge of their own health by having readily accessible information about their health status. According to the Milken Inst., lifestyle diseases consume 70% of the US?s health care resources and face an unsustainable future in light of rising health care costs. It has been shown that humans are more likely to change lifestyle habits if they witness real-time, positive changes in their health as a result of those changes. The Wellness Track will provide an unobtrusive, battery-free interface for sensing of multiple vital signs, along with advanced and secure communication strateg